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Introduction of new type microwave plasma CVD diamond reactors
Introduction of new type microwave plasma CVD diamond reactors (a) (b) (c) (a) first homemade 75kW/915MHz ellipsoidal microwave plasma chemicalvapor deposition (MPCVD) reactor developed for growing large area high quality diamond film with high growth rate, (b) 10kW/2.45 GHz TM01 mode circumferential antenna-ellipsoidal cavity type MPCVD reator, (c) the plasma ignited in the reator High power microwave CVD diamond reactors with innovative design in the deposition chamber by which the coupling efficiency is enhanced, whilst the contamination to the microwave window is drastically reduced, have been successfully introduced, which include the ellipsoidal as well as the cylindrical type reactorsR&D for large area high quality freestanding diamond wafers
R&D for large area high quality freestanding diamond wafers suitable for high power laser window and high power microwave (Gyrotron) window, as well as for electronic applications. 3-5 inch (φ76-127mm) crack-free and high quality diamond films were prepared by optimizing deposition parameters These microwave reactors are fully functional, and the process parameters for fabrication of large size, high quality freestanding diamond disks suitable for the use as optical,laser, and microwave windows have been optimized.Growth of large size high quality single crystal diamond
Growth of large size high quality single crystal diamond Large size (with a thickness exceeding 2mm) and high purity diamond single crystal grown by microwave plasma CVD. As per our examination, the sample color and clarity can all reach the gem grade level. With the optimization of process parameters, the crystal growth rate can reach up to 30 um/h, and the thickness tolerance of polishing sample can reach + / - 0.05 mm, crystallographic orientation deviation can reach ±2 ° and the surface roughness Ra < 30 nm. The full width at half maximum (FWHM) of diamond (400) peak in the X-ray rocking curve is only 0.008 (left), whilst the nitrogen content in the diamond single crystal isestimated to be less than 1.1 ppm from the tiny absorption peak at 270nm (right). Diamond single crystal with nitrogen content as low as 0.7ppm (700ppb) has also beensuccessfully obtained.
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